Selective CaAs／AlGaAs RIE Etching Using SIC<sub>4</sub>／CF<sub>4</sub>／He Gas Mixture
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Denki Kagaku oyobi Kogyo Butsuri Kagaku
سال: 1991
ISSN: 0366-9297,2434-2556
DOI: 10.5796/kogyobutsurikagaku.59.1077